Atomic Resolved Secondary Electron Imaging with an Aberration Corrected Scanning Transmission Electron Microscope
نویسندگان
چکیده
منابع مشابه
Three-dimensional imaging by optical sectioning in the aberration-corrected scanning transmission electron microscope.
The depth resolution for optical sectioning in the scanning transmission electron microscope is measured using the results of optical sectioning experiments of laterally extended objects. We show that the depth resolution depends on the numerical aperture of the objective lens as expected. We also find, however, that the depth resolution depends on the lateral extent of the object that is being...
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The new possibilities of aberration-corrected scanning transmission electron microscopy (STEM) extend far beyond the factor of 2 or more in lateral resolution that was the original motivation. The smaller probe also gives enhanced single atom sensitivity, both for imaging and for spectroscopy, enabling light elements to be detected in a Z-contrast image and giving much improved phase contrast i...
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The use of spherical aberration correctors in the scanning transmission electron microscope (STEM) has the effect of reducing the depth of field of the microscope, making three-dimensional imaging of a specimen possible by optical sectioning. Depth resolution can be improved further by placing aberration correctors and lenses pre and post specimen to achieve an imaging mode known as scanning co...
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Electron holography allows the reconstruction of the complete electron wave, and hence offers the possibility of correcting aberrations. In fact, this was shown by means of the uncorrected CM30 Special Tübingen transmission electron microscope (TEM), revealing, after numerical aberration correction, a resolution of approximately 0.1 nm, both in amplitude and phase. However, it turned out that t...
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ژورنال
عنوان ژورنال: Microscopy and Microanalysis
سال: 2011
ISSN: 1431-9276,1435-8115
DOI: 10.1017/s1431927611007367